T2R2 Open-Access Full-Text Files Surpass 5,000 Mark!
30 May 2016
■ The number of open full-text files has exceeded 5,000!
The number of T2R2 full-text files accessible to the public exceeded 5,000 on April 20, 2016, and we would like to express our sincere gratitude to all the researchers whose contributions have helped Tokyo Tech to achieve this milestone. The T2R2 system will continue facilitating the dissemination of research being carried out at Tokyo Tech. We appreciate your continuing use of the T2R2 system and your cooperation in data input and file registration.
■ Professor Atsushi Takahashi registers the 5,000th file in T2R2!
The 5,000th paper registered in the T2R2 was published by Professor Atsushi Takahashi, the School of Engineering.
- Please give a summary of your paper.
In integrated circuit manufacturing, optical lithography equipment transfers
a circuit pattern on a wafer by exposure process (lithography), and forms it
by etching process. However, it is theoretically impossible to form a circuit
pattern whose line pitch is less than about 40 nm by current optical lithography
equipment in which the wave length of ArF Excimer Laser used as illumination source
is 193 nm. Therefore, various kinds of manufacturing methods are used to form
a tiny complex circuit pattern on a wafer. LELECUT, the target of this paper,
is one of such manufacturing methods. In LELECUT, litho-etch (LE) process is
repeated twice (LELE) to form a pattern and a part of it is removed (CUT) by
the third litho-etch process. The pattern treated in each litho-etch process
should satisfy the condition for litho-etch, and the effect caused by overlay
error among litho-etch processes should be minimized. In this paper, an efficient
method obtaining a robust pattern decomposition against overlay error by positive
semidefinite relaxation is proposed.
- Who are the readers being targeted by this publication?
This paper was published in a journal for advanced VLSI manufacturing technologies.
I am very happy if this paper is read by researchers who are interested in
algorithm etc. as well as by researchers who are interested in lithography.
- What research are you planning in the future?
By analyzing next generation lithography theoretically and practically,
we would like to continue with our research on developing a practical design flow
that matches next generation lithography.
■ If you register your full-text files in the T2R2 system, there are benefits such as:
- The registered files will be permanently stored and managed by the university.
- The registered files can be managed in the unified data storage.
■ Disclosing full-text files via the T2R2 system has advantages such as:
Articles which are registered in T2R2 can be found by search engines such as Google and Google Scholar, meaning the articles can be accessed by researchers all over the world, and thus the research will be widely recognized. Disclosing full-text files increases the possibility of gaining new readers and can boost citation indexes.
■ In order to publish your full-text files in the T2R2 system.
- Access the T2R2 system registration site through Tokyo Tech Portal and click “Register” in the Tool Box located on the left side of the screen, then click “New data entry form” to proceed to the data registration screen.
- Click “File upload”to register your full-text file, and choose “Wish to disclose”.
- Please choose “Status of copyright” for the publication registered in “File”.
- After the copyright of the publisher is checked by the office, the full-text files registered as “Wish to disclose” will be open to the public accordingly. To check the progress of the publication, please refer to the message under “File” on the data registration screen of the T2R2 system.
- T2R2 system registration tip
・You may use “New data entry wizard” in the Tool Box.
・You may designate a proxy to register your article for you.
■ When you register your full-text files in the T2R2 system.
- If you wish to open your publications to readers outside of Tokyo Tech, make sure to check with your coauthors before you register your files.
- You may need to replace your files, or you may not be able to publish your files depending on the regulations of each publisher.