Cl2-誘導結合型プラズマエッチングにおけるヤヌス型トリプチセンTripC12のエッチング特性の評価

Publication Information

Title

Japanese:	Cl2-誘導結合型プラズマエッチングにおけるヤヌス型トリプチセンTripC12のエッチング特性の評価
English:	Etching characterization of Janus-type Triptycene (TripC12) in Cl2 based inductively coupled plasma etching process

Author

Japanese:	松谷晃宏, 石割文崇, 庄子良晃, 上原卓也, 中川勝, 福島孝典.
English:	Akihiro matsutani, Fumitaka Ishiwari, Yoshiaki Shoji, Takuya Uehara, Masaru Nakagawa, Takanori Fukushima.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 1, 2014

Publisher

Japanese:
English:

Conference name

Japanese:	2014年第75回応用物理学会秋季学術講演会
English:	The 75th JSAP Autumn Meeting 2014

Conference site

Japanese:	札幌
English:	Sapporo