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Akihiro Matsutani Researcher Information

Family Name 松谷  Matsutani 
First Name 晃宏  Akihiro 
Organization Tokyo Institute of Technology Open Facility Center
Degree A Study of Reactive Ion Beam Etching Process for Optoelectronic Micro-Devices,  Thesis,  Doctor (Engineering),  Tokyo Institute of Technology,  1999/02/28,   

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