Yield-aware mask assignment using positive semidefinite relaxation in LELECUT triple patterning

Publication Information

Title

Japanese:
English:	Yield-aware mask assignment using positive semidefinite relaxation in LELECUT triple patterning

Author

Japanese:	小平行秀, Chikaaki Kodama, 松井知己, 高橋篤司, Shigeki Nojima, Satoshi Tanaka.
English:	Yukihide Kohira, Chikaaki Kodama, Tomomi Matsui, Atsushi Takahashi, Shigeki Nojima, Satoshi Tanaka.

Language

English

Journal/Book name

Japanese:
English:	Proc. SPIE 9427, Design-Process-Technology Co-optimization for Manufacturability IX, 94270B

Volume, Number, Page

1-9

Published date

Mar. 26, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

File

DOI