MEMS VCSEL集積スローライト導波路ビームスキャナの作製

Publication Information

Title

Japanese:	MEMS VCSEL集積スローライト導波路ビームスキャナの作製
English:	Fabrication of slow-light beam scanner integrated with a MEMS VCSEL

Author

Japanese:	井上俊也, 旭利紘, 西村駿, 中濵正統, 松谷晃宏, 坂口孝浩, 小山二三夫.
English:	Shunya Inoue, Toshihiro Asahi, Shun Nishimura, Masanori Nakahama, Akihiro Matsutani, Takahiro Sakaguchi, FUMIO KOYAMA.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

18a-B203-7

Published date

Mar. 2018

Publisher

Japanese:
English:

Conference name

Japanese:	第65回応用物理学会春季学術講演会
English:

Conference site

Japanese:	東京
English: