引張り歪層によるSi基板上InP小片接合界面の垂直応力抑制

Publication Information

Title

Japanese:	引張り歪層によるSi基板上InP小片接合界面の垂直応力抑制
English:

Author

Japanese:	菊地健彦, 白柳, 御手洗拓矢, 八木英樹, 新田俊之, 古川将人, 雨宮智宏, 西山伸彦.
English:	Takehiko Kikuchi, Liu Bai, Takuya Mitarai, Yagi Hideki, Toshiyuki Nitta, Masato Furukawa, Tomohiro Amemiya, Nobuhiko Nishiyama.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 2019

Publisher

Japanese:
English:

Conference name

Japanese:	第80回応用物理学会秋季学術講演会
English:

Conference site

Japanese:
English: