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Publication Information
Title
Japanese:
スパッタリング法で室温合成した(Al1-xScx)N膜の強誘電性評価
English:
Author
Japanese:
安岡慎之介
,
清水荘雄
, 上原雅人, 山田浩志, 秋山守人,
舟窪浩
.
English:
Shinnosuke Yasuoka
,
Shimizu Takao
, 上原雅人, 山田浩志, 秋山守人,
HIROSHI FUNAKUBO
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Sept. 8, 2020
Publisher
Japanese:
English:
Conference name
Japanese:
第81回応用物理学会秋季学術講演会
English:
Conference site
Japanese:
English:
©2007
Institute of Science Tokyo All rights reserved.