Impact of deposition temperature on crystal structure and ferroelectric properties of (Al1-xScx)N films prepared by sputtering method

Publication Information

Title

Japanese:
English:	Impact of deposition temperature on crystal structure and ferroelectric properties of (Al1-xScx)N films prepared by sputtering method

Author

Japanese:	安岡慎之介, 清水荘雄, Masato Uehara, Hiroshi Yamada, Morito Akiyama, 舟窪浩.
English:	Shinnosuke Yasuoka, Takao Shimizu, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Phys. Status Solidi A 2021

Volume, Number, Page

pp. 2100302-1-6

Published date

Sept. 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI