Thickness scaling of (Al0.8Sc0.2)N films with remanent polarization beyond 100 μC/cm2 around 10 nm in thickness

Publication Information

Title

Japanese:
English:	Thickness scaling of (Al0.8Sc0.2)N films with remanent polarization beyond 100 μC/cm2 around 10 nm in thickness

Author

Japanese:	水谷涼一, 安岡慎之介, 白石貴久, 清水荘雄, Masato Uehara, Hiroshi Yamada, Morito Akiyama, 坂田修身, 舟窪浩.
English:	Ryoichi Mizutani, Shinnosuke Yasuoka, Takahisa Shiraishi, Takao Shimizu, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Osami Sakata, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Appl. Phys. Exp.

Volume, Number, Page

Vol. 14 pp. 105501

Published date

Sept. 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI