Downscaling and low temperature deposition of ferroelectric (Al1-xScx)N thin films deposited by dual sputtering

Publication Information

Title

Japanese:
English:	Downscaling and low temperature deposition of ferroelectric (Al1-xScx)N thin films deposited by dual sputtering

Author

Japanese:	安岡慎之介, 清水荘雄, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Yoshiomi Hiranaga, 長康雄, 舟窪浩.
English:	Shinnosuke Yasuoka, Takao Shimizu, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Yoshiomi Hiranaga, Yasuo Cho, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

May 16, 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2021 ISAF-ISIF-PFM Joint Conference

Conference site

Japanese:
English: