強誘電体(Al1-xScx)N薄膜の結晶構造と電気特性の関係

Publication Information

Title

Japanese:	強誘電体(Al1-xScx)N薄膜の結晶構造と電気特性の関係
English:

Author

Japanese:	安岡慎之介, 水谷涼一, 大田怜佳, 白石貴久, 清水荘雄, 上原雅人, 山田浩志, 秋山守人, 舟窪浩.
English:	Shinnosuke Yasuoka, Ryoichi Mizutani, Reika Ota, Takahisa Shiraishi, Shimizu Takao, 上原雅人, 山田浩志, 秋山守人, HIROSHI FUNAKUBO.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 4, 2021

Publisher

Japanese:
English:

Conference name

Japanese:	第41回電子材料研究討論会
English:

Conference site

Japanese:
English: