Establishment of Control Method for Ferroelectric Properties in (Al1-xScx)N Films

Publication Information

Title

Japanese:
English:	Establishment of Control Method for Ferroelectric Properties in (Al1-xScx)N Films

Author

Japanese:	安岡慎之介, 水谷涼一, 大田怜佳, 白石貴久, 清水荘雄, Masato Uehara, Hiroshi Yamada, Morito Akiyama, 舟窪浩.
English:	Shinnosuke Yasuoka, Ryoichi Mizutani, Reika Ota, Takahisa Shiraishi, Takao Shimizu, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

May 23, 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2022 MRS Spring Meeting & Exhibit

Conference site

Japanese:
English:	Honolulu, Hawai’i