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Title
Japanese:トモグラフィック発光分光計測によるフッ素原子コロナモデルに基づくCF4/O2プラズマの電子温度診断 
English:Electron temperature diagnosis of CF4/O2 plasma based on fluorine atomic corona model by tomographic optical emission spectroscopic measurement 
Author
Japanese: 山下 雄也, 土居 謙太, 清田 哲司, 渡邊 修平, 島谷 和希, 菊地 航行, 根津 篤, 赤塚 洋.  
English: Yuya Yamashita, Kenta Doi, Tetsuji Kiyota, Shuhei Watanabe, Kazuki Shimatani, Wataru Kikuchi, Atsushi Nezu, Hiroshi Akatsuka.  
Language Japanese 
Journal/Book name
Japanese:第71回応用物理学会春季学術講演会 講演予稿集 
English:Extended Abstracts of the 71st JSAP Spring Meeting 
Volume, Number, Page         p. 07-009
Published date Mar. 5, 2024 
Publisher
Japanese:公益社団法人 応用物理学会 
English:The Japan Society of Applied Physics (JSAP) 
Conference name
Japanese:第71回応用物理学会春季学術講演会 
English:The 71st JSAP Spring Meeting 
Conference site
Japanese:東京 
English:Tokyo 
Official URL https://pub.confit.atlas.jp/ja/event/jsap2024s/presentation/22a-12G-8
 
Abstract In this study, spectral emission coefficients of CF4 /O2 inductively coupled plasma were measured with a multichannel spectrometer with 34 lines of sight placed at the sides of the chamber. The horizontal distribution of spectral emission coefficients was obtained by spectral tomographic calculations based on a constrained regularization method. From the optical emission line spectra, the excited-level number densities of fluorine atoms 3 p^4 ^4D[7/2]^O and 3p^2 ^2P[3/2]^O were determined. The position distribution of electron temperature was diagnosed assuming corona equilibrium. The effect of chamber structure and equipment parameters on the position distribution of electron temperature is discussed.

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