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Publication List - Kazuki Shimatani (6 / 6 entries)
International Conference (Reviewed)
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Yuya Yamashita,
Kenta Doi,
Tetsuji Kiyota,
Shuhei Watanabe,
Kazuki Shimatani,
Wataru Kikuchi,
Yuchen Ye,
Atsushi Nezu,
Hiroshi Akatsuka.
Electron temperature diagnosis of CF4/O2 plasma based on fluorine atomic corona model by tomographic optical emission spectroscopic measurement,
ESCAMPIG (Europhysics Conference on Atomic and Molecular Physics of Ionized Gases) 2024,
Proceedings of ESCAMPIG2024,
Department of Plasma Physics and Technology of Masaryk University (MUNI),
July 2024.
Official location
International Conference (Not reviewed / Unknown)
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Kenta Ishi,
Kenta Doi,
Tetsuji Kiyota,
Yuya Yamashita,
Kazuma Yoneda,
Shuhei Watanabe,
Kazuki Shimatani,
Atsushi Nezu,
Hiroshi Akatsuka.
Population Kinetics and Number Densities of Excited Species in Nitrogen Inductively Coupled Plasma,
ISPlasma2024/IC-PLANTS2024/APSPT-13,
Proc. ISPlasma2024/IC-PLANTS2024/APSPT-13,
Organizing Committee of ISPlasma2024/IC-PLANTS2024/APSPT-13,
Mar. 2024.
Official location
Domestic Conference (Not reviewed / Unknown)
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uya Yamashita,
Kenta Doi,
Tetsuji Kiyota,
Yuchen Ye,
Kazuki Shimatani,
Wentao He,
Hinata Hanyu,
Wataru Kikuchi,
Ayaki Sakurai,
Atsushi Nezu,
Hiroshi Akatsuka.
Positional distribution diagnosis of electron temperature, electron density, and EEDF of CF4/O2/Ar plasma based on tomographic optical emission spectroscopic measurement and argon collisional-radiative model,
The 85th JSAP Autumn Meeting 2024,
Exetnded Abstracts of the 85th JSAP Autumn Meeting 2024,
Japan Society of Applied Physics,
Sept. 2024.
Official location
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Yuya Yamashita,
Kenta Doi,
Tetsuji Kiyota,
Shuhei Watanabe,
Kazuki Shimatani,
Wataru Kikuchi,
Atsushi Nezu,
Hiroshi Akatsuka.
Electron temperature diagnosis of CF4/O2 plasma based on fluorine atomic corona model by tomographic optical emission spectroscopic measurement,
The 71st JSAP Spring Meeting,
Extended Abstracts of the 71st JSAP Spring Meeting,
The Japan Society of Applied Physics (JSAP),
p. 07-009,
Mar. 2024.
Official location
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Kenta Ishi,
Kenta Doi,
Tetsuji Kiyota,
Yuya Yamashita,
Kazuma Yoneda,
Shuhei Watanabe,
Kazuki Shimatani,
Atsushi Nezu,
Hiroshi Akatsuka.
Discussion on the Relationship between Number Densities of Excited States and Electron Temperature in Inductively Coupled Nitrogen Plasma,
The 41st Symposium on Plasma Processing,
Proceedings of 41st Symposium on Plasma Processing (SPP-41),
Plasma Electronics Division, Japan Society of Applied Physics,
pp. 30-31,
Jan. 2024.
Official location
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Yuchen Ye,
Kenta Doi,
Tetsuji Kiyota,
Shuhei Watanabe,
Kazuki Shimatani,
Ayaki Sakurai,
Yuya Yamashita,
Wataru Kikuchi,
Atsushi Nezu,
Hiroshi Akatsuka.
Electron Temperature and Density Diagnosis in Argon Dual-Frequency ICP by Tomographic Optical Emission Spectroscopy and Langmuir Probe Measurements,
The 41st annual meeting of The Japan Society of Plasma Science and Nuclear Fusion Research,
Extended Abstracts of the 41st Annual Meeting of JSPF,
The Japan Society of Plasma Science and Nuclear Fusion Research,
2024.
Official location
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