|
Publication List - Kazuki Shimatani (3 / 3 entries)
International Conference (Not reviewed / Unknown)
-
Kenta Ishi,
Kenta Doi,
Tetsuji Kiyota,
Yuya Yamashita,
Kazuma Yoneda,
Shuhei Watanabe,
Kazuki Shimatani,
Atsushi Nezu,
Hiroshi Akatsuka.
Population Kinetics and Number Densities of Excited Species in Nitrogen Inductively Coupled Plasma,
ISPlasma2024/IC-PLANTS2024/APSPT-13,
Proc. ISPlasma2024/IC-PLANTS2024/APSPT-13,
Organizing Committee of ISPlasma2024/IC-PLANTS2024/APSPT-13,
Mar. 2024.
Official location
Domestic Conference (Not reviewed / Unknown)
-
Yuya Yamashita,
Kenta Doi,
Tetsuji Kiyota,
Shuhei Watanabe,
Kazuki Shimatani,
Wataru Kikuchi,
Atsushi Nezu,
Hiroshi Akatsuka.
Electron temperature diagnosis of CF4/O2 plasma based on fluorine atomic corona model by tomographic optical emission spectroscopic measurement,
The 71st JSAP Spring Meeting,
Extended Abstracts of the 71st JSAP Spring Meeting,
The Japan Society of Applied Physics (JSAP),
p. 07-009,
Mar. 2024.
Official location
-
Kenta Ishi,
Kenta Doi,
Tetsuji Kiyota,
Yuya Yamashita,
Kazuma Yoneda,
Shuhei Watanabe,
Kazuki Shimatani,
Atsushi Nezu,
Hiroshi Akatsuka.
Discussion on the Relationship between Number Densities of Excited States and Electron Temperature in Inductively Coupled Nitrogen Plasma,
The 41st Symposium on Plasma Processing,
Proceedings of 41st Symposium on Plasma Processing (SPP-41),
Plasma Electronics Division, Japan Society of Applied Physics,
pp. 30-31,
Jan. 2024.
Official location
[ Save as BibTeX ]
[ Paper, Presentations, Books, Others, Degrees: Save as CSV
]
[ Patents: Save as CSV
]
|