Effect of gas annealing on the ferroelectric property of (Al0.8Sc0.2)N thin film

Publication Information

Title

Japanese:
English:	Effect of gas annealing on the ferroelectric property of (Al0.8Sc0.2)N thin film

Author

Japanese:	Nana Sun, 岡本一輝, 安岡慎之介, Naoko Matsui, Toshikazu Irisawa, Koji Tsunekawa, 舟窪浩.
English:	Nana Sun, Kazuki Okamoto, Shinnosuke Yasuoka, Naoko Matsui, Toshikazu Irisawa, Koji Tsunekawa, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Jan. 7, 2024

Publisher

Japanese:
English:

Conference name

Japanese:	第62回セラミックス基礎科学討論会
English:

Conference site

Japanese:	東京都
English: