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Title
Japanese:スパッタリング法によるAlN-(Mg, Si)N膜の作製とその特性評価 
English: 
Author
Japanese: 影山壮太郎, 岡本一輝, 安岡慎之介, 舟窪浩.  
English: Sotaro Kageyama, Kazuki Okamoto, Shinnosuke Yasuoka, HIROSHI FUNAKUBO.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Jan. 7, 2024 
Publisher
Japanese: 
English: 
Conference name
Japanese:第62回セラミックス基礎科学討論会 
English: 
Conference site
Japanese:東京都 
English: 

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