Si基板上SiO2窓構造への異種材料小片接合プロセスに向けたエッチングプロセスの検討

Publication Information

Title

Japanese:	Si基板上SiO2窓構造への異種材料小片接合プロセスに向けたエッチングプロセスの検討
English:

Author

Japanese:	吉井大翔, 菊地健彦, 守田憲司, 北村俊昭, 西山伸彦.
English:	Masato Yoshii, Takehiko Kikuchi, Kenji Morita, Toshiaki Kitamura, Nobuhiko Nishiyama.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 14, 2025

Publisher

Japanese:
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Conference name

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Conference site

Japanese:	千葉
English: