Spatial Distribution Diagnosis of Electron Temperature and Density in Inductively Coupled Nitrogen-Argon Plasma by Tomographic OES: Validation with High-Resolution Single-Channel Spectroscopy and Langmuir Probe Measurement
This study investigates the spatial distribution of electron temperature (Te) and electron density (ne) in
inductively coupled nitrogen-argon plasma using tomographic optical emission spectroscopy (OES) and a
numerical chemical-kinetic model. Although diagnosing nitrogen plasma via OES is complex due to
various excited states, this method successfully visualized the 2-D profiles of plasma parameters.
According to the results of tomographic OES, Te increases with RF power, while ne decreases. The
diagnostic characteristics were examined by comparing the results with high-resolution single-channel
OES and Langmuir probe measurements.
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