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Naoki Kagi Researcher Information

Family Name 鍵  Kagi 
First Name 直樹  Naoki 
Organization Tokyo Institute of Technology School of Environment and Society
ResearcherID AAA-2154-2021
Specialized Field Architectural environment/equipment (Building Science and Building Equipment)
Research Theme Architectural environment 
Degree クリーンルームにおける有機物質のシリコンウェハ表面への吸着機構に関する研究,  Thesis,  Doctor of Engineering,  Tokyo Institute of Technology,  1999/--/--, 

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