論文

• Kisuke Miyado, Devi Srujana Tenneti, Akira Onishi, Katsuyuki Machida, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito. Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology, Japanese Journal of Applied Physics, Vol. 63, No. 4, p. 04SP23, Feb. 2024.  公式リンク  
  

国際会議発表 (査読有り)

• Shunkai Watanabe, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Tenneti Devi Srujana, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Investigation of Effects of Applied Voltage on Effective Young’s modulus of Ti/Au Multi-Layered Micro-Cantilevers” New Method of Damage and Failure Analysis of Structural Part, CPIT2024, New Method of Damage and Failure Analysis of Structural Part, New Method of Damage and Failure Analysis of Structural Part, CPIT2024, New Method of Damage and Failure Analysis of Structural Part, Oct. 2024.
• Syunkai Watanabe, Shunkai Watanabe, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Tenneti Devi Srujana, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Dependence of Applied Voltage on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers, 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), Sept. 2024.
• Kisuke Miyado, Torauto Yamada, Devi Srujana Tenneti, Chihaya Mukaide, Katsuyuki Machida, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito. Effect of Perforated Proof-Mass Hole Size on Device Characteristics of Gold Single-Axis MEMS Accelerometer for Micro-g Level Sensing, 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), Sept. 2024.
• Devi Srujana Tenneti, Kisuke Miyado, Chihaya Mukaide, Torauto Yamada, Katsuyuki Machida, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito. Suppression of Warpage in Perforated Proof-Mass of Gold Single-Axis MEMS Accelerometers for Micro-g Level Sensing, 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), Sept. 2024.

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