学位論文

• Improvement of MoS2 Film Quality using Low-Particle-Flux Sputtering at Low-Substrate Temperature for Future 3D-Stacked Field-Effect Transistors,  Thesis,  Doctor (Engineering),  Tokyo Institute of Technology,  2025/03/26, 
• Improvement of MoS2 Film Quality using Low-Particle-Flux Sputtering at Low-Substrate Temperature for Future 3D-Stacked Field-Effect Transistors,  Summary,  Doctor (Engineering),  Tokyo Institute of Technology,  2025/03/26, 

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