|
田村雄太 研究業績一覧 (11件)
- 2024
- 2023
- 2022
- 2021
- 2020
- 全件表示
国際会議発表 (査読なし・不明)
-
吉原亮,
Yuta Tamura,
Kuniyuki KAKUSHIMA,
パールハットアヘメト,
片岡好則,
Akira Nishiyama,
Nobuyuki Sugii,
KAZUO TSUTSUI,
Kenji Natori,
takeo hattori,
HIROSHI IWAI.
A Novel Ohmic Contact Process for n-Ge Substrates,
R. Yoshihara, Y. Tamura, K. Kakushima, P. Ahmet, Y. Kataoka, A. Nishiyama, N. Sugii, K. Tsutsui, K. Natori, T. Hattori, H. Iwai, “A Novel Ohmic Contact Process for n-Ge Substrates”, Workshop and IEEE EDS Mini-colloquium on Nanometer CMOS Technology (WIMNACT 37),
2013.
-
吉原亮,
Yuta Tamura,
Kuniyuki KAKUSHIMA,
パールハットアヘメト,
Akira Nishiyama,
杉井信之,
KAZUO TSUTSUI,
Kenji Natori,
takeo hattori,
HIROSHI IWAI.
Electrical characterization of atomically flat NiSi2 Schottky diode,
G-COE PICE International Symposium and IEEE EDS Minicolloquium on Advanced Hybrid Nano Devices: Prospects by World’s Leading Scientists,
2013.
-
Yuta Tamura,
吉原亮,
Kuniyuki KAKUSHIMA,
中塚理,
パールハットアヘメト,
Hiroshi Nohira,
KAZUO TSUTSUI,
西山彰,
Nobuyuki Sugii,
Kenji Natori,
takeo hattori,
HIROSHI IWAI.
Electrical Properties of Ultrathin-Nickel-Silicide Schottky Diodes on Si(100),
15th International Conference on Thin Films,
2013.
-
Yuta Tamura,
吉原亮,
Kuniyuki KAKUSHIMA,
パールハットアヘメト,
西山彰,
Nobuyuki Sugii,
KAZUO TSUTSUI,
Kenji Natori,
takeo hattori,
HIROSHI IWAI.
A novel Ni silicidation technology for Schottky diode formation,
G-COE PICE International Symposium and IEEE EDS Minicolloquium on Advanced Hybrid Nano Devices: Prospects by World’s Leading Scientists,
2013.
-
Yuta Tamura,
吉原亮,
Kuniyuki KAKUSHIMA,
パールハットアヘメト,
片岡好則,
Akira Nishiyama,
Nobuyuki Sugii,
KAZUO TSUTSUI,
Kenji Natori,
takeo hattori,
HIROSHI IWAI.
Stacked Ni-Silicidation Process for Schottky Barrier FET,
Workshop and IEEE EDS Mini-colloquium on Nanometer CMOS Technology (WIMNACT 37),
2013.
-
吉原亮,
Yuta Tamura,
Kuniyuki KAKUSHIMA,
パールハットアヘメト,
Akira Nishiyama,
Nobuyuki Sugii,
KAZUO TSUTSUI,
Kenji Natori,
takeo hattori,
HIROSHI IWAI.
Electrical characterization of atomically flat NiSi2 Schottky diode”, Ni silicidation for Si Fin and nanowire strucures,
IEEE EDS MQ WIMNACT 32 C0-sponsored by EDS Japan Chapter and TIT,
2012.
-
Yuta Tamura,
吉原亮,
Kuniyuki KAKUSHIMA,
HIROSHI IWAI.
A novel Ni silicidation technology for Schottky diode formation,
IEEE EDS MQ WIMNACT 32 C0-sponsored by EDS Japan Chapter and TIT,
2012.
-
Kuniyuki KAKUSHIMA,
Yuta Tamura,
吉原亮,
KAZUO TSUTSUI,
HIROSHI IWAI.
Interface Controlled Stacked Ni Silicidation Process with Schottky Barrier Height Controllability,
K. Kakushima, Y. Tamura, R. Yoshihara, K. Tsutsui, H. Iwai,
2012.
-
Yuta Tamura,
吉原亮,
Kuniyuki KAKUSHIMA,
パールハットアヘメト,
片岡好則,
Akira Nishiyama,
Nobuyuki Sugii,
KAZUO TSUTSUI,
Kenji Natori,
takeo hattori,
HIROSHI IWAI.
A Proposal of Schottky Barrire Height Tuning Method with Interface Controlled Ni/Si Stacked Silicidation Process,
ECS 222nd Meeting,
ECS Transactions,
2012.
-
吉原亮,
Yuta Tamura,
Kuniyuki KAKUSHIMA,
パールハットアヘメト,
片岡好則,
Akira Nishiyama,
Nobuyuki Sugii,
KAZUO TSUTSUI,
Kenji Natori,
takeo hattori,
HIROSHI IWAI.
Thermally stable NiSi2 for Ge contact with Schottky barrirer height modulation capability,
ECS 222nd Meeting,
ECS Transactions,
Vol. 50,
No. 9,
pp. 217-221,
2012.
国内会議発表 (査読なし・不明)
-
田村雄太,
角嶋邦之,
中塚 理,
パールハットアヘメト,
筒井一生,
西山彰,
杉井信之,
名取研二,
服部健雄,
岩井洋.
NiとSiの積層薄膜によって形成したシリサイドのシート抵抗に対する熱処理温度の影響,
第72回応用物理学会学術講演会,
2011.
[ BibTeX 形式で保存 ]
[ 論文・著書をCSV形式で保存
]
[ 特許をCSV形式で保存
]
|