論文

• Ryosuke Miyai, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Akira Onishi, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Clarification of Geometric Effects on Long-Term Structural Stability of Ti/Au Multi- Layered Micro-Cantilevers, Micro and Nano Engineering, Vol. 23, p. 100244, Mar. 2024.  公式リンク  
  

国際会議発表 (査読有り)

• Ryosuke Miyai, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Evaluation of the Effect of Heat Treatment on the Structural Stability of Au Micro-Cantilevers with Ti/Au Multi-layered Structures, 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), Sept. 2024.
• Ryosuke Miyai, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Akira Onishi, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Comprehensive Evaluation of Geometric Effects on Long-Term Structure Stability of Ti/Au Multi-Layered Micro-Cantilevers toward Gold-MEMS Capacitive Accelerometer, 49th international conference on Micro and Nano Engineering (MNE2023), 49th international conference on Micro and Nano Engineering (MNE2023), Sept. 2023.

国内会議発表 (査読有り)

• 宮井 良介, 栗岡 智行, Chun-Yi Chen, Tso-Fu Mark Chang, 町田 克之, 伊藤 浩之, 三宅 美博, 曽根 正人. Ti/Au 積層構造有するマイクロカンチレバーの 構造安定性に対する熱処理の影響評価, 第71回応用物理学会春季学術講演会, Proc. The 71st JSAP Spring MeetinProc., p. 23a-12K-1, Mar. 2024.
• 宮井 良介, 栗岡 智行, Chun-Yi Chen, Tso-Fu Mark Chang, 大西 哲, Parthojit Chakraborty, 町田 克之, 伊藤 浩之, 三宅 美博, 曽根 正人. Ti/Au 積層構造有するマイクロカンチレバーの長期構造安定性に対する幾何学構造の影響, 第70回応用物理学会春季学術講演会, 第70回応用物理学会春季学術講演会, p. 16a-B410-5, Mar. 2023.

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