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石川拓 研究業績一覧 (1件)
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論文
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Tadahiro Ohmi,
Hiraku ISHIKAWA,
Toshihisa NOZAWA,
Takaaki MATSUOKA,
Akinobu TERAMOTO,
Masaki HIRAYAMA,
Takashi ITO,
Tadahiro OHMI.
Evaluation of New Amorphous Hydrocarbon Film for Copper Barrier Dielectric Film in Low-k Copper Metallization,
Japanese Journal of Applied Physics,
The Japan Society of Applied Physics,
Vol. 47,
No. 4,
pp. 2531–2534,
Apr. 2008.
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