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GuXun 研究業績一覧 (1件)
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論文
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Xun Gu,
Takenao Nemoto,
Akinobu Teramoto,
Takashi Ito,
Tadahiro Ohmi.
Effect of Additives in Organic Acid Solutions for Post-CMP Cleaning on Polymer Low-k Fluorocarbon,
J. Electrochem. Soc.,
J. Electrochem. Soc.,
Vol. 156,
No. 6,
pp. H409-H415,
June 2009.
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