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研究業績一覧 (2件)
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論文
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"K. Tuokedaerhan",
"R. Tan,
K. Kakushima",
"P. Ahmet",
"Y. Kataoka",
"A. Nishiyama",
"N. Sugii",
"H. Wakabayashi",
"K. Tsutsui",
"K. Natori",
"T. Hattori",
"H. Iwai".
Stacked sputtering process for Ti, Ta, and W carbide formation for gate metal application,
Applied Physics Letters (APL),
Vol. 103,
Sept. 2013.
国際会議発表 (査読有り)
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T. Kamale,
R. Tan,
K. Kakushima,
P. Ahmet,
Y. Kataoka,
A. Nishiyama,
N. Sugii,
K. Tsutsui,
K. Natori,
T. Hattori,
H. Iwai.
Interface Properties La-Silicate MOS Capacitors with Tungsten Carbide Gate Electrode for Scaled EOT,
PRiME 2012,
Oct. 2012.
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