国際会議発表 (査読有り)

• B. Mizuno, Y. Sasaki, C. G. Jin, K. Okashita, K. Nakamoto, T. Kitaoka, K. Tsutsui, H. A. Sauddin, H. Iwai. Production-worthy approach of Plasma Doping (PD), The 9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT 2008), Oct. 2008.
• H. Sauddin, Y. Sasaki, H. Ito, B. Mizuno, P. Ahmet, K. Kakushima, N. Sugii, K. Tsutsui, H. Iwai. Leakage Current Characteristics of Ultra-Shallow Junctions formed by B2H6 Plasma Doping, 2006 Joint International Meeting of ECS, Oct. 2006.
• Y. Sasaki, H. Ito, K. Okashita, H. Tamura, C. G. Jin, B. Mizuno, T. Okumura, I. Aiba, Y. Fukagawa, H. Sauddin, K. Tsutsui, H. Iwai. Production-worthy USJ formation by self-regulatory plasma doping method, IIT2006, 2006.
• Y. Sasaki, B. Mizuno, S. Akama, R. Higaki, K. Tsutsui, S. Ohmi, H. Iwai. Gas Phase Doping at Room Temperature, 3rd International Workshop on Junction Technology (IWJT2002), Dec. 2002.
• Y. Sasaki, B. Mizuno, S. Akama, R. Higaki, K. Tsutsui, S. Ohmi, H. Iwai. Helicon Wave Plasma Doping System, 3rd International Workshop on Junction Technology (IWJT2002), Dec. 2002.

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