|
御宿希祐 研究業績一覧 (1件 / 9件)
論文
-
Kisuke Miyado,
Devi Srujana Tenneti,
Akira Onishi,
Katsuyuki Machida,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology,
Japanese Journal of Applied Physics,
Vol. 63,
No. 4,
p. 04SP23,
Feb. 2024.
公式リンク
[ BibTeX 形式で保存 ]
[ 論文・著書をCSV形式で保存
]
[ 特許をCSV形式で保存
]
|