Tokyo Tech Research Repository (T2R2)

Patent Information

Title

半導体装置の製造方法

Author

Shun-ichiro OHMI.

Kind

Patent

Status

Registered

Applicant

国立大学法人東京工業大学, セイコーエプソン株式会社.

Filing Date

2006/05/31

Application Number

特願2006-151441

Unexamined Application Date

2007/12/13

Publication Number

特開2007-324292

Registration Date

2011/11/04

Registration Number

特許第4854074号

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