Tokyo Tech Research Repository (T2R2)

Patent Information

Title

金属酸化物単結晶基板表面の平坦化方法及び金属酸化物単結晶基板

Author

HIDEOMI KOINUMA, YUJI MATSUMOTO.

Kind

Patent

Status

Published

Applicant

国立大学法人東京工業大学.

Filing Date

2005/03/28

Application Number

特願2005-091840

Unexamined Application Date

2006/04/13

Publication Number

特開2006-096649

Note

審査未請求取下

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