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Patent Information


Title
成膜方法及び酸化物薄膜素子 
Author
HIROSHI FUNAKUBO.  
Kind
Patent 
Status
Published 
Applicant
国立大学法人東京工業大学, キヤノン株式会社.  
Filing Date
2006/10/20
Application Number
特願2006-286094
Unexamined Application Date
2007/06/07
Publication Number
特開2007-142385

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