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Patent Information
Title
成膜方法及び酸化物薄膜素子
Author
HIROSHI FUNAKUBO
.
Kind
Patent
Status
Published
Applicant
国立大学法人東京工業大学, キヤノン株式会社.
Filing Date
2006/10/20
Application Number
特願2006-286094
Unexamined Application Date
2007/06/07
Publication Number
特開2007-142385
©2007
Tokyo Institute of Technology All rights reserved.