Science Tokyo Research Repository (T2R2)

Patent Information

Title

発振素子、及び検査装置

Author

MASAHIRO ASADA.

Kind

Patent

Status

Published

Applicant

国立大学法人東京工業大学, キヤノン株式会社.

Filing Date

2007/08/20

Application Number

特願2007-213644

Unexamined Application Date

2009/03/05

Publication Number

特開2009-049692

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