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Patent Information


Title
炭素膜製造装置、および炭素膜の製造方法 
Author
ATSUSHI HIRATA.  
Kind
Patent 
Status
Published 
Applicant
国立大学法人東京工業大学.  
Filing Date
2009/06/03
Application Number
特願2009-134304
Unexamined Application Date
2010/12/16
Publication Number
特開2010-280937

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