Tokyo Tech Research Repository (T2R2)

Patent Information

Title

集束イオンビームを用いる微細部位解析装置

Author

Masaaki Fujii, Shun-ichi Ishiuchi.

Kind

Patent

Status

Registered

Applicant

国立大学法人東京工業大学, 新日本製鐵株式会社.

Filing Date

2006/08/03

Application Number

特願2006-212399

Unexamined Application Date

2008/02/21

Publication Number

特開2008-039521

Registration Date

2011/07/22

Registration Number

特許第4785193号

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