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Patent Information
Title
非鉛誘電体薄膜形成用液組成物及びその薄膜の形成方法並びにその方法で形成された非鉛誘電体薄膜
Author
HIROSHI FUNAKUBO
,
TakaoShimizu
,
Junichi Kimura
.
Kind
Patent
Status
Published
Applicant
国立大学法人東京工業大学, 三菱マテリアル株式会社.
Filing Date
2014/08/27
Application Number
特願2014-172543
Unexamined Application Date
2015/06/11
Publication Number
特開2015-107904
Note
未審取下
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