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Patent Information
Title
強誘電体薄膜の製造方法
Author
HIROSHI FUNAKUBO
.
Kind
Patent
Status
Registered
Applicant
国立大学法人東京工業大学, キヤノン株式会社, 国立大学法人京都大学.
Filing Date
2010/09/29
Application Number
特願2010-218892
Unexamined Application Date
2011/05/12
Publication Number
特開2011-093788
Registration Date
2015/10/23
Registration Number
特許第5826476号
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