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Patent Information
Title
微細素子およびその製造方法
Author
Kazuya Masu
,
Hiroyuki Ito
,
Daisuke Yamane
.
Kind
Patent
Status
Registered
Applicant
国立大学法人東京工業大学, エヌ・ティ・ティ・アドバンステクノロジ株式会社.
Filing Date
2015/12/28
Application Number
特願2015-256285
Unexamined Application Date
2017/07/06
Publication Number
特開2017-120205
Registration Date
2019/05/10
Registration Number
特許第6519021号
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