Tokyo Tech Research Repository (T2R2)

Patent Information

Title

トリクロロシランの製造方法

Author

Yuji Wada, dai mochizuki, Thubasa Fujii.

Kind

Patent

Status

Registered

Applicant

国立大学法人東京工業大学, 東亞合成株式会社.

Filing Date

2015/06/18

Application Number

特願2016-545015

Unexamined Application Date

2017/07/13

Publication Number

再表2016/031362

Registration Date

2018/02/16

Registration Number

特許第6288626号

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