Tokyo Tech Research Repository (T2R2)

Patent Information

Title

半導体装置および測定装置

Author

Takayuki Iwasaki, Mutsuko Hatano.

Kind

Patent

Status

Published

Applicant

国立大学法人東京工業大学.

Filing Date

2016/03/08

Application Number

特願2016-044454

Unexamined Application Date

2017/09/14

Publication Number

特開2017-162910

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