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Patent Information
Title
圧電薄膜、圧電薄膜素子、圧電アクチュエータ、圧電センサ、ヘッドアセンブリ、ヘッドスタックアセンブリ、ハードディスクドライブ、プリンタヘッド、及びインクジェットプリンタ装置
Author
HIROSHI FUNAKUBO
,
TakaoShimizu
,
Yuichi Nemoto
.
Kind
Patent
Status
Published
Applicant
国立大学法人東京工業大学, TDK株式会社.
Filing Date
2017/10/25
Application Number
特願2017-206190
Unexamined Application Date
2019/05/23
Publication Number
特開2019-079948
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Tokyo Institute of Technology All rights reserved.