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Patent Information
Title
半導体化合物、半導体化合物の層を有する半導体素子、積層体、およびターゲット
Author
HIDEO HOSONO
,
Junghwan Kim
,
Joonho Bang
,
Hideya Kumomi
.
Kind
Patent
Status
Published
Applicant
国立大学法人東京工業大学, AGC株式会社.
Filing Date
2018/10/30
Application Number
特願2019-557079
Unexamined Application Date
2020/12/17
Publication Number
再表2019/107046
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Tokyo Institute of Technology All rights reserved.