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Patent Information


Title
マイクロバルブ及びそれを用いたマイクロポンプ 
Author
Joon-wan KIM, Tatsuya Matsubara.  
Kind
Patent 
Status
Published 
Applicant
国立大学法人東京工業大学.  
Filing Date
2021/02/03
Application Number
特願2021-015852
Unexamined Application Date
2022/08/16
Publication Number
特開2022-118970

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