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Patent Information


Title
強誘電性薄膜の形成方法、それを備える半導体装置 
Author
Shun-ichiro OHMI.  
Kind
Patent 
Status
Published 
Applicant
国立大学法人東京工業大学.  
Filing Date
2022/02/18
Application Number
PCT/JP2022/006613
Unexamined Application Date
2022/09/15
Publication Number
WO 2022/190817

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