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Patent Information


Title
半導体装置および浮遊ゲートデバイスの製造方法 
Author
Shun-ichiro OHMI.  
Kind
Patent 
Status
Published 
Applicant
国立大学法人東京工業大学.  
Filing Date
2021/02/25
Application Number
特願2021-028111
Unexamined Application Date
2022/09/06
Publication Number
特開2022-129448

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