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Patent Information
Title
パターン形成方法、及びプラズマ処理方法
Author
Takanori Fukushima
,
Yoshiaki Shoji
,
Takashi Kajitani
,
Hibiki Ogiwara
.
Kind
Patent
Status
Published
Applicant
国立大学法人東京工業大学, 東京エレクトロン株式会社.
Filing Date
2022/06/27
Application Number
PCT/JP2022/025607
Unexamined Application Date
2023/01/12
Publication Number
WO 2023/282114
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Tokyo Institute of Technology All rights reserved.