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Patent Information


Title
パターン形成方法、及びプラズマ処理方法 
Author
Takanori Fukushima, Yoshiaki Shoji, Takashi Kajitani, Hibiki Ogiwara.  
Kind
Patent 
Status
Published 
Applicant
国立大学法人東京工業大学, 東京エレクトロン株式会社.  
Filing Date
2022/06/27
Application Number
PCT/JP2022/025607
Unexamined Application Date
2023/01/12
Publication Number
WO 2023/282114

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