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Patent Information


Title
プラズマによる対象物の処理方法およびシステム 
Author
AKITOSHI OKINO, Zhizhi Liu, Yuito Mori, Kazuki Nakai.  
Kind
Patent 
Status
Published 
Applicant
国立大学法人東京工業大学.  
Filing Date
2021/10/12
Application Number
特願2021-167633
Unexamined Application Date
2023/04/24
Publication Number
特開2023-057888

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