Japanese
Home
Search
Horizontal Search
Publication Search
( Advanced Search )
Patent Search
( Advanced Search )
Research Highlight Search
( Advanced Search )
Researcher Search
Search by Organization
Support
FAQ
T2R2 User Registration
Doctoral thesis registration
Support/Contact
About T2R2
What's T2R2?
Operation Guidance
Leaflets
About file disclosure
Related Links
Tokyo Tech
STAR Search
NII IR Program
Home
>
Help
Patent Information
Title
プラズマによる対象物の処理方法およびシステム
Author
AKITOSHI OKINO
,
Zhizhi Liu
,
Yuito Mori
,
Kazuki Nakai
.
Kind
Patent
Status
Published
Applicant
国立大学法人東京工業大学.
Filing Date
2021/10/12
Application Number
特願2021-167633
Unexamined Application Date
2023/04/24
Publication Number
特開2023-057888
©2007
Tokyo Institute of Technology All rights reserved.