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Patent Information


Title
酸化ガリウム系半導体の製造方法 
Author
Akira Ohtomo, Takuto Soma, Kazuki Koreishi.  
Kind
Patent 
Status
Published 
Applicant
国立大学法人東京工業大学, トヨタ自動車株式会社.  
Filing Date
2022/08/25
Application Number
特願2022-134426
Unexamined Application Date
2024/03/07
Publication Number
特開2024-031100

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