Science Tokyo Research Repository (T2R2)

Patent Information

Title

静電吸着デバイス、反り矯正方法、及び取付方法

Author

Shigeki SAITO, Jumpei Yoshimoto, Yuki Taoka.

Kind

Patent

Status

Published

Applicant

国立大学法人東京工業大学.

Filing Date

2024/08/28

Application Number

PCT/JP2024/030734

Unexamined Application Date

2025/03/06

Publication Number

WO 2025/047804

Note

審査未請

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