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Patent Information


Title
圧電薄膜、及び圧電薄膜素子 
Author
HIROSHI FUNAKUBO, Kazuki Okamoto.  
Kind
Patent 
Status
Published 
Applicant
国立大学法人東京科学大学, ＴＤＫ株式会社.  
Filing Date
2023/11/10
Application Number
特願2023-192421
Unexamined Application Date
2025/05/22
Publication Number
特開2025-079626

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