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Patent Information


Title
窒化マグネシウムケイ素膜、圧電体及び圧電素子 
Author
HIROSHI FUNAKUBO, Sotaro Kageyama, Kazuki Okamoto, Shinnosuke Yasuoka.  
Kind
Patent 
Status
Published 
Applicant
国立大学法人東京科学大学, 東ソー株式会社.  
Filing Date
2023/12/28
Application Number
特願2023-222941
Unexamined Application Date
2025/07/10
Publication Number
特開2025-104821

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